Please use this identifier to cite or link to this item:
http://hdl.handle.net/2307/335
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Notargiacomo, Andrea | - |
dc.contributor.author | Di Gaspare, Luciana | - |
dc.contributor.author | Evangelisti, Florestano | - |
dc.date.accessioned | 2010-07-16T12:24:11Z | - |
dc.date.available | 2010-07-16T12:24:11Z | - |
dc.date.issued | 2009-08 | - |
dc.identifier.issn | 0749-6036 | - |
dc.identifier.uri | http://hdl.handle.net/2307/335 | - |
dc.description.abstract | We present morphological and electrical characterizations of thin andnarrow resistors obtained by focused ion beam assisted deposition of Ptbased material.For thin and narrow depositions the measured thickness and width aresignificantly different from the nominal values. From leakage tests wefound that in order to have electrically insulated parallel resistorsat room temperature, it is mandatory that the Pt-halo, which resultsfrom the deposition procedure, has a thickness well below 6 nm. (C)2008 Elsevier Ltd. All rights reserved. | en |
dc.language.iso | en | en |
dc.publisher | Elsevier Science | en |
dc.relation.ispartof | Superlattices and microstructures | en |
dc.subject | Focused ion beam | en |
dc.subject | Ion beam induced deposition | en |
dc.subject | Nanoelectrodes | en |
dc.subject | One-dimensional structures | en |
dc.title | Ion beam assisted processes for Pt nanoelectrode fabrication onto 1-Dnanostructures | en |
dc.type | Article | en |
dc.subject.miur | Settori Disciplinari MIUR::Scienze fisiche | en |
dc.subject.miur | Scienze fisiche | - |
dc.subject.isicrui | Categorie ISI-CRUI::Scienze fisiche | en |
dc.subject.isicrui | Scienze fisiche | - |
dc.subject.anagraferoma3 | Scienze fisiche | en |
dc.relation.volumenumber | 46 | en |
dc.relation.pagenumber | 149-152 | en |
dc.identifier.doi | 10.1016/j.spmi.2008.11.013 | - |
dc.relation.issuenumber | 1-2 | en |
dc.description.romatrecurrent | Dipartimento di Fisica 'Edoardo Amaldi' | * |
item.languageiso639-1 | other | - |
item.grantfulltext | restricted | - |
item.fulltext | With Fulltext | - |
Appears in Collections: | A - Articolo su rivista X_Dipartimento di Fisica 'Edoardo Amaldi' |
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09-SM-46-149.pdf | 454.28 kB | Adobe PDF | Request a copy |
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